Thermal response of AlN and CNx films as coatings of thin film anemometers

Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments.

► Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers. ► Coating layers have been deposited by RF sputtering on Teflon substrates under different process conditions. ► Thermal equivalent models are proposed in this work for the investigated materials. ► Thermal measurements carried out shown that AlN layers are the most suitable material for the hot film anemometer design.