MEMS magnetometer based on magnetorheological elastomer

To develop a simple and low-cost MEMS magnetometer, a novel sensor based on the magnetostrictive effect of magnetorheological elastomer is proposed. The micromechanical sensor consists of a silicon sensitivity diaphragm embedded with a piezoresistive Wheatstone bridge, and a magnetorheological elastomer layer attached on the sensitivity diaphragm. The interaction between the magnetic field and the elastomer generates a deflection of the sensitivity diaphragm, which changes the piezoresistance and unbalances a Wheatstone bridge. The experimental results show that the sensor has good linearity in the magnetic field range of 0–120 kA/m and the saturation magnetic field is ∼150 kA/m. This simple, low-cost, low-power sensor is easily integrated with electronic circuits using the MEMS processes.

► We propose a novel magnetometer based on magnetorheological elastomer (MRE) and silicon sensitivity diaphragm. ► MRE is fabricated by epoxy resin and carbonyl nickel. ► We study the influence of MRE’s magnetostriction on magnetometer’s output. ► Changing magnetic particle will change the linear range of the magnetometer. ► Changing elastic medium will change the sensitivity of the magnetometer.