Accurate determination of spring constant of atomic force microscope cantilevers and comparison with other methods

We present calibration results of commercial AFM cantilevers using the KRISS nanoforce calibrator (NFC) that can determine traceably spring constants with an uncertainty better than 1%, along with the results obtained from other four calibration methods: the dimensional method, the cantilever-on-cantilever method, the Sader method, and the thermal noise method. Two types (contact and tapping mode) of beam-shaped AFM cantilevers with nominal spring constants of 0.9 N m−1 and 42 N m−1, respectively, were investigated in this study. Because of its small uncertainty, the NFC method was used to assess the uncertainties of other four methods through comparisons between values obtained from other methods and those from the NFC method for the same cantilever. Results from other methods were generally in good agreement with those from the NFC method within the uncertainties of other methods claimed in other literatures, but values obtained from the Sader method were differed by up to 40% from the NFC values, which is 2 times worse than the known uncertainty.