| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 730406 | Measurement | 2012 | 4 Pages |
In this study, the design and characterization of vacuum gauge calibration system which was upgraded is described. A capacitance diaphragm manometer is used to characterize the system performance. 1 Torr and 10 Torr CDGs are available to compare the performance of VGMS system which is traceable to the static expansion system generating calibration pressures in the range of 9 × 10−4 Pa up to 1 × 103 Pa. The working pressure range of VGMS system is 1 × 10−4–1.3 × 105 Pa. It is used a comparison method as a calibration process. After making the system description and process, the results of calibrations included uncertainty values are given to determine long term instability and show the performance of the system.
► In this study, we describe the characterization of vacuum gauge calibration system. ► The stable, uniform and constant pressure is very important to get accurate results. ► The automatization of calibration system provides more efficient calibration service. ► The stability of reference pressure value depends on calibration chamber design. ► We determined the long term instabilities for 1 and 10 Torr CDGs.
