| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 732162 | Optics & Laser Technology | 2015 | 7 Pages |
Abstract
•Study of Surface Plasmon and Lossy Mode Resonance obtained with an ITO thin-film.•ITO is characterized with SEM, XRD, AFM, contact angle, conductivity, and ellipsometry.•Influence of post-annealing on the position of resonances in the optical spectrum.
Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields.
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Authors
I. Del Villar, C.R. Zamarreño, M. Hernaez, P. Sanchez, F.J. Arregui, I.R. Matias,