Laser micro-machined semi-slinky like MEMS structures: Novel interface coolers

Laser micro-machining has recently been considered a precision and reproducible manufacturing technique in MEMS fabrication because of the superior characteristics of a focused laser beam. It is not only a unique tool but also an invisible optical drill. The aim of the present paper is two-fold: to manufacture novel miniaturized titanium 3D MEMS surface structures in order to increase the cooling performance. Second is to find the behaviors of the operational parameters which controlling the laser-material interaction mechanisms and also suggest the best adjustments in order to achieve this novel semi-slinky like spiral MEMS surface structures with using a 20 W ytterbium fiber laser. Pure titanium micro-MEMS product which has novel interface coolers was manufactured using a ytterbium fiber laser (λ=1060 nm) with 40 ns pulse duration. Best adjustments were, respectively, the pulse duration: 40 ns, the pulse energy: 0.4 mJ, the laser scanning speed: 336.1 mm/s, the peak power density: 17.46 ⁎ 108 W/cm2.

► I manufactured novel 3D MEMS surface structures to increase the cooling performance. ► I suggested the best adjustments to achieve this novel MEMS surface structures. ► I stated a new theory can be called as “photon inhibition”. ► This idea may allow better periodical shaping of surfaces with laser micromachining.