Structure and optical properties of nanostructured zinc oxide films with different growth temperatures

ZnO films were prepared by pulsed laser deposition (PLD) on glass substrate with temperature ranging from room temperature (RT) to 500 °C. All the films formed the hexagonal wurtzite structure and showed the c-axis (0 0 2) preferred orientation. The films deposited at 200 °C showed the narrowest full width at half maximum of both X-ray diffraction (XRD) and rocking curve, largest height grain size, smallest macrostress and least point defects. Meanwhile, it was found that the films deposited at 350 °C displayed the most intense diffraction peak in XRD and a strong UV emission while it showed the most intense defect-related green emission, fastest growth rate and larger macrostress. In addition, the cross section images showed all films grew with a columnar form along (0 0 2) orientation.