Article ID Journal Published Year Pages File Type
734198 Optics & Laser Technology 2008 5 Pages PDF
Abstract

ZnO thin films were grown on Si(1 0 0) substrates using pulsed laser deposition in O2 gas ambient (10 Pa) and at different substrate temperatures (25, 150, 300 and 400 °C). The influence of the substrate temperature on the structural and morphological properties of the films was investigated using XRD, AFM and SEM. At substrate temperature of T=150 °C, a good quality ZnO film was fabricated that exhibits an average grain size of 15.1 nm with an average RMS roughness of 3.4 nm. The refractive index and the thickness of the thin films determined by the ellipsometry data are also presented and discussed.

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