PECVD SiC optical waveguide loss and mode characteristics

We report the fabrication of single mode SiC (silicon carbide) waveguides and the measurement of their propagation loss. By studying the effect of sidewalls scattering loss due to surface roughness and by reducing it, minimal propagation loss of 2.3 dB/cm for the TM polarization is measured in the visible at 0.633 μm. This loss can be used as a benchmark for further development of SiC microphotonic components and circuit for sensor systems in harsh environment.