Strain measurement of SU-8 photoresist by a digital image correlation method with a hybrid genetic algorithm

Digital image correlation (DIC) is a whole-field and non-contact strain measuring method. It could provide deformation information of a specimen by processing two digital images that are captured before and after the deformation. To search the deformed images, a hybrid genetic algorithm, in which a simulated annealing mutation process and adaptive mechanisms are added to the real-parameter genetic algorithm, is proposed in this work. To increase the accuracy and reliability of this method, some key parameters of this method are suggested. Then, this method is used to measure the strain during the micro tensile testing of SU-8 photoresist. In addition to the conventional single region, a double region is proposed to calculate the strain by DIC. The results indicate that while the strains obtained by single region are reasonable, those obtained by double region are accurate. Also the mechanical properties of SU-8 could be accurately obtained.