| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 735674 | Optics and Lasers in Engineering | 2013 | 5 Pages |
A general coherent gradient sensor (CGS) system without temperature constraint has been investigated for the measurement of curvatures and nonuniform curvatures changes in film-substrate systems. According to a strict mathematical derivation with the wave nature of light, systematic absolute error limit and relative error limit of the CGS system are presented at arbitrary temperature. It is found that with the decrease of the ambient temperature, the systematic relative error limit increases with a negative exponential law.
Research HighlightsThis paper presents error limit of the CGS system without temperature constraint. ► Relative error limit increases with a negative exponential law. ► CGS system is expanded with arbitrary temperature and/ or different mediums.
