Carbon nanotube thermal probe for quantitative temperature sensing

•A novel surface temperature profiler using a single carbon nanotube is developed.•The quantitative temperature measurement is validated.•Sensor sensitivity is analyzed and the sensor configuration is optimized.•Heating technique at the nanoscale contact point is developed.

Quantitative temperature sensing at the nanoscale point contact is developed using a platinum hot film sensor with a carbon nanotube (CNT) as a thermal probe. High spatial resolution and robustness is achieved because of the small tip radius and high stiffness of the CNT. The quantitative local temperature at the CNT probe contact point is determined by bringing the probe in and out of contact and controlling the amount of heat of the Pt hot film in high vacuum environment. Using this method, we overcome the problems of thermal contact resistance (TCR) between the CNT and sample surface. Sensor sensitivity for TCR and thermal conductivity measurement of a CNT is analyzed and the sensor configuration is optimized.