| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 736519 | Sensors and Actuators A: Physical | 2010 | 5 Pages |
Abstract
Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m = 0, participates in the vibration modes of the microdiaphragm symmetrically loaded by pressure. The piezoelectric circular microdiaphragm was fabricated by combining sol–gel PZT thin film and MEMS technology. A high value of pressure sensitivity, as high as 280 Hz/mbar, has been achieved; this value is 2.43 times higher than the currently reported sensitivity (i.e., 115 Hz/mbar) in the literature.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
M. Olfatnia, T. Xu, J.M. Miao, L.S. Ong, X.M. Jing, L. Norford,