| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 736800 | Sensors and Actuators A: Physical | 2009 | 5 Pages |
Abstract
Sputtered magnetostrictive Galfenol acts as sensing layer in a bending sensor based on a passive oscillating circuit. The change of the permeability is detected via a planar rectangular Cu inductor on top of the sensor. A Cu thin film beneath the Galfenol with Ti as adhesive promoter supports the growth of a (1 1 0) fiber texture which improves the permeability change.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
C. Wenzel, B. Adolphi, U. Merkel, A. Jahn, U. Marschner, J. Ziske, H. Neubert, W.-J. Fischer,