| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 736812 | Sensors and Actuators A: Physical | 2009 | 5 Pages |
Abstract
A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of MEMS and NEMS devices. The setup has 100 pm/√Hz in-plane measurement resolution for 1 μm full-width-half-maximum spot size illumination and 4 pm/√Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Hüseyin Rahmi Seren, Hakan Ürey,