Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
737137 | Sensors and Actuators A: Physical | 2013 | 8 Pages |
Abstract
We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2–6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.
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Authors
S. Kim, X. Zhang, R. Daugherty, E. Lee, G. Kunnen, D.R. Allee, E. Forsythe, J. Chae,