Article ID Journal Published Year Pages File Type
737417 Sensors and Actuators A: Physical 2007 6 Pages PDF
Abstract
This work investigates the mechanics of microcantilever deflection due to growth of a vapor microbubble. We construct a theoretical model to predict the elastic beam deflection due to the capillary pressure developed by the bubble growing between the beam and a substrate. The theory is in good agreement with our experimental results in both macro- and micro-scales. The deflection of a thin-solid structure due to growing bubbles can be used in such micromachines as microactuators, microgenerators and micropumps, which are operated as immersed in liquid.
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Authors
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