Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
737417 | Sensors and Actuators A: Physical | 2007 | 6 Pages |
Abstract
This work investigates the mechanics of microcantilever deflection due to growth of a vapor microbubble. We construct a theoretical model to predict the elastic beam deflection due to the capillary pressure developed by the bubble growing between the beam and a substrate. The theory is in good agreement with our experimental results in both macro- and micro-scales. The deflection of a thin-solid structure due to growing bubbles can be used in such micromachines as microactuators, microgenerators and micropumps, which are operated as immersed in liquid.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Heon Ju Lee, Young Soo Chang, Yoon Pyo Lee, Kwang-Hun Jeong, Ho-Young Kim,