Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
737500 | Sensors and Actuators A: Physical | 2012 | 7 Pages |
Abstract
A very simple displacement sensor is presented with nanometric resolution over centimetric travel range. The compact system is composed of a laser-diode module and a photodiode array leading to a non-contact sensor. With a corner cube configuration, it is not sensitive to most of main mechanical defects of the mobile platform. The use of an optical fiber and a normalization process inspired from classical four-quadrant detectors allows high repeatability and minimal drifts. This paper exposes the setup, simulations and experimental results. Several displacements over millimeters range with a resolution of 1.2 nm sustain the simulations.
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Authors
A. Missoffe, L. Chassagne, S. Topçu, P. Ruaux, B. Cagneau, Y. Alayli,