| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 737532 | Sensors and Actuators A: Physical | 2013 | 5 Pages |
Abstract
We report on the damping properties of NiTi/Pb(Zr0.52Ti0.48)O3 (PZT) heterostructures using nanoindentation technique. Creep and impact tests were performed to obtain hardness (H), elastic modulus (Er), damping factor (tan δ) and figure of merit (FOM. A hold time of 30 s during creep test shows significant improvement in damping factor for NiTi/PZT (0.046) and CrTiN/NiTi/PZT (0.050). Impact test demonstrates highest damping capacity with lowest coefficient of restitution (0.30) in CrTiN/NiTi/PZT. Higher hardness (19.8 GPa) and excellent figure of merit (0.751) in CrTiN/NiTi/PZT makes them very attractive damping material for microelectromechanical systems (MEMS).
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Nitin Choudhary, D.K. Kharat, J. Van Humbeeck, Davinder Kaur,