| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 737561 | Sensors and Actuators A: Physical | 2006 | 7 Pages |
Abstract
Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang,