| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 737615 | Sensors and Actuators A: Physical | 2012 | 7 Pages |
Abstract
A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.
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Authors
Amir Heidari, Yong-Jin Yoon, Mi Kyoung Park, Woo-Tae Park, Julius Ming-Lin Tsai,