MEMS scanner based handheld fluorescence hyperspectral imaging system

We demonstrate a micromirror based hand-held hyperspectral fluorescence imaging microsystem for skin cancer detection, where multiple narrow-band spectral images can be captured simultaneously across the area under examination. In addition to the advantages of combined functional imaging and spectroscopy, the system demonstrates the fast scanning over large field-of-view (FOV) provided by a CMOS compatible 2-axis microelectromechanical system (MEMS) scanning mirror in the probe. Spectral information from 15 wavelengths was acquired simultaneously using a multichannel photomultiplier tube (PMT), rendering a spectral resolution of 20 nm. FOV up to 0.8 cm × 0.5 cm with 50 μm lateral resolution was acquired, with a hyperspectral imaging rendering rate of 2 s per frame.