Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks

A multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology is developed with the aim of miniaturizing conventional bulky optical measurement systems for application in future optical wireless sensor networks (WSNs). Low-coherence interferometry is used as the sensing principle, which allows for high performance sensing with multiple heterogeneous sensors. The entire platform with the associated electric circuit has a footprint of 2 in. × 1.8 in. × 0.75 in., which are integrated with a conventional WSN module to form an optical WSN node. The multifunctionality of the platform is successfully demonstrated for simultaneous interrogation of a Fabry–Pérot (FP) pressure sensor and a FP temperature sensor. To prove the optical sensor platform's multifunctionality, chemical sensing is also demonstrated with a FP sensor. The multifunctional optical sensor platform and the optical WSN node will enable optical WSNs, which are expected to impact many fronts including those space-constrained applications and monitoring in harsh environments.