Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
737673 | Sensors and Actuators A: Physical | 2011 | 4 Pages |
Abstract
We report a microcantilever probe with a 5 nm gold deflection sensor for the study of local mechanical properties such as adhesion and elasticity on a sample. The probe has a dynamic range of tens of microns, which allows for a deeper insight into the mechanical properties of materials. The gauge factor of the piezoresistive sensor is 4.1 ± 0.1 and the deflection sensitivity is 0.1 ppm/nm. Noise analysis indicates a minimum detectable deflection of ≈0.7 nm. Topographical scans are demonstrated. Studies of adhesion and stiffness of two different samples demonstrate the usefulness of the probe in the investigation of local mechanical properties.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Angelo Gaitas, Tao Li, Weibin Zhu,