Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
737732 | Sensors and Actuators A: Physical | 2010 | 6 Pages |
Abstract
An innovative parallel gap bistable switch is demonstrated, based on a nickel-plating process with a polymer mold. It combines two different actuator mechanisms to yield extremely low steady state power consumption: thermal actuation is used for the stroke movement, whereas electrostatic actuation is used to latch the on state. This makes it useful for low-power applications where continuous thermal drive is not possible. Strokes of 20 μm can be achieved, with thermal actuation power of 1 W during the switching movement. In a second stage, the position can be electrostatically held with a voltage of 15 V, requiring no further power. The actuator's size is approximately 1.5 mm2.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
M. Driesen, F. Ceyssens, J. Decoster, R. Puers,