Static pull-in analysis of microcantilevers based on the modified couple stress theory

This paper investigates the deflection and static pull-in voltage of microcantilevers based on the modified couple stress theory, a non-classic continuum theory capable to predict the size effects for structures in micron and sub-micron scales. It is shown that the couple stress theory can remove the gap between the experimental observations and the classical theory based simulations for the static pull-in voltage.

► We study the size dependent behavior of electrostatically actuated microbeams. ► We used modified couple stress theory to capture the size effect. ► Results are in good agreement with experimental observations. ► According to experimental results, length scale parameter of silicon is estimated.