| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738018 | Sensors and Actuators A: Physical | 2008 | 10 Pages |
Abstract
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications, such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings and recommend sensor selection based on parameters, including measurement area, time and resolution.
Keywords
Related Topics
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Electrochemistry
Authors
Peter J. Boltryk, Martyn Hill, John W. McBride, Antony Nascè,