Article ID Journal Published Year Pages File Type
738020 Sensors and Actuators A: Physical 2008 9 Pages PDF
Abstract

A novel triaxial force sensing device developed by the authors with a MEMS sensor as core component is mounted on a subnanometric resolution nanomanipulator having three degrees of freedom (DOF). This sensorized device allows measuring forces on the nanomanipulator tip in the range of 0–3 N for normal and ±50 mN for tangential forces with a resolution of 11 bits. Together with a haptic input device, a setup was created allowing palpation and force feeling. The mathematical model used to drive the master haptic interface force feedback capabilities is based on online force and stiffness measurement. The performance of the novel setup is demonstrated with a cell palpation experiment.

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Physical Sciences and Engineering Chemistry Electrochemistry
Authors
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