| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738026 | Sensors and Actuators A: Physical | 2008 | 6 Pages |
Abstract
This work presents a simple evanescent wave-sensing system based on plasma-enhanced chemical vapour deposition (PECVD) silicon carbide (SiC) waveguides. Thin SiC films were deposited on Si substrates with a SiO2 film acting as a cladding layer around the carbide core. In the sensor, the evanescent tale of the light travelling in a waveguide senses an absorbant medium placed above the waveguide. By using a 1 × 2 power splitter, the sensor is calibrated using one arm as a reference. This shows that the sensitivity of such a sensor is improved by choosing SiC as waveguide material compared to silicon nitride (SiN) films.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
G. Pandraud, P.J. French, P.M. Sarro,