| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738060 | Sensors and Actuators A: Physical | 2008 | 6 Pages |
Abstract
A new approach of a MEMS power generator based on a piezoelectric diaphragm is presented. A MEMS design is introduced taking into account an optimum diaphragm thickness and a beneficial electrode structure. Moreover, experiments for small and large deflections demonstrate the functionality of the energy converter. Electrical measurements point out dependencies regarding electrical load, residual stress within the diaphragm and electrode design. The frequency response for small deflections and the time response for large deflections of the device are also determined.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Ingo Kuehne, Djordje Marinkovic, Gerald Eckstein, Helmut Seidel,