Article ID Journal Published Year Pages File Type
738067 Sensors and Actuators A: Physical 2008 6 Pages PDF
Abstract

A micromechanical resonator with eigenfrequencies in the MHz-region is excited by using an AM-modulated GHz-range signal. The excitation voltage is down-converted to a force at the fundamental frequency of the resonator by voltage-force-non-linearity of the electromechanical transducer. Measurements are verified by simulations with excellent agreement. Finally, a method of coding information bits is presented and tested.

Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
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