Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
738083 | Sensors and Actuators A: Physical | 2011 | 8 Pages |
Abstract
Direct UV written differential pressure sensors have been fabricated in a silica-on-silicon platform. The reported components achieve physical sensitivity through actuating planar Bragg gratings defined within a thin (<40 μm) silica membrane. The optimised transducer exploits the condition of static membrane buckling to resolve both positive and negative pressure differentials, either side of the membrane. The fabricated device has demonstrated operation over a 202 kPa range with a 0.36 kPa resolution.
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Authors
Christopher Holmes, James C. Gates, P.G.R. Smith,