Article ID Journal Published Year Pages File Type
738083 Sensors and Actuators A: Physical 2011 8 Pages PDF
Abstract

Direct UV written differential pressure sensors have been fabricated in a silica-on-silicon platform. The reported components achieve physical sensitivity through actuating planar Bragg gratings defined within a thin (<40 μm) silica membrane. The optimised transducer exploits the condition of static membrane buckling to resolve both positive and negative pressure differentials, either side of the membrane. The fabricated device has demonstrated operation over a 202 kPa range with a 0.36 kPa resolution.

Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
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