Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
738223 | Sensors and Actuators A: Physical | 2007 | 4 Pages |
Abstract
We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Hiroaki Yamazaki, Tamio Ikehashi, Tatsuya Ohguro, Etsuji Ogawa, Kenji Kojima, Kazunari Ishimaru, Hidemi Ishiuchi,