| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738456 | Sensors and Actuators A: Physical | 2007 | 7 Pages |
Abstract
Miniaturized Golay cells based on tunneling displacement transducers were first produced at the Jet Propulsion Laboratory (JPL). The devices produced have performance characteristics comparable to the best thermal infrared detectors of comparable dimensions. This work describes a high yield wafer-scale process for fabrication of tunneling infrared detectors. The sensors produced have performance comparable to the best tunneling sensors made so far.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Olaleye Ajakaiye, John Grade, Choongsoo Shin, Thomas Kenny,