| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738473 | Sensors and Actuators A: Physical | 2009 | 11 Pages |
Abstract
A cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference. A series of small arrays (approximately 100 × 100 pixels) were fabricated using 8-in. silicon MEMS processes. The array design and process development will be discussed and initial uniformity and imaging results presented. Future challenges in developing a direct-view IR imager will be addressed.
Related Topics
Physical Sciences and Engineering
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Authors
C.D.W. Jones, C.A. Bolle, R. Ryf, M.E. Simon, F. Pardo, V.A. Aksyuk, W.Y.-C. Lai, J.E. Bower, J.F. Miner, F.P. Klemens, R.A. Cirelli, T.W. Sorsch, E.J. Ferry, L.A. Fetter, C.-S. Pai, J.A. Taylor, B. Vyas, G.P. Watson, B. Stekas, M.R. Baker,