Article ID Journal Published Year Pages File Type
738615 Sensors and Actuators A: Physical 2006 5 Pages PDF
Abstract

Improvements in the ferroelectric properties were obtained by controlling process parameters of the lead titanate (PTO) seed layer. Highly oriented (1 1 1) perovskite lead zirconate titanate (PZT) films yielded the largest polarization switching charges, with an improved retention behavior, compared to those of PZT films without a PbTiO3 seed layer. The degree of (1 1 1) orientation in a PZT perovskite film increased, when an additional heat treatment process was not applied during formation of the PTO seed layer. In addition, PTO seed layers showed the best results when 8% excess Pb was supplied.

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Physical Sciences and Engineering Chemistry Electrochemistry
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