A novel tiny ultrasonic linear motor using the radial mode of a bimorph

The new-typed tiny ultrasonic motor has been introduced to have compact and simple structure. The linear motion of a new-type linear motor is operated by a principle of inertia displacement. The motor can be realized by the central movement of transducing part, which is the maximum displacement of the up-and-down movement. The transducing parts, using different diameters, 3.0 and 5.0 mm and thickness of 0.1 and 0.2 mm metal disks, were fabricated and the dynamic characteristics of the motors were measured. The motor with piezoelectric ceramic of Ø3 needs higher operating voltage than the motor with the piezoelectric ceramic of Ø5.