| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738659 | Sensors and Actuators A: Physical | 2008 | 6 Pages |
Abstract
A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described.A small-amplitude, high-frequency voltage signal is applied between the movable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device.Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained.
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Authors
Giacomo Langfelder, Antonio Longoni, Federico Zaraga,