Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
738743 | Sensors and Actuators A: Physical | 2008 | 9 Pages |
Abstract
This paper reports a novel electrothermal actuator design that can generate large vertical displacements with almost no lateral shift. The lateral-shift-free (LSF) piston motion is achieved by using a unique three-bimorph actuation mechanism. Both micromirrors and microlens holders based on this new actuator design have been fabricated using a combined surface- and bulk-micromachining process. A 0.62 mm vertical displacement is measured at only 5.3 V for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 μm) and tilting angle (0.7°) are very small in that full vertical displacement range. The measured resonant frequency of the vertical motion mode is about 0.5 KHz. The thermal response time is about 25 ms.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Lei Wu, Huikai Xie,