| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 738991 | Sensors and Actuators A: Physical | 2007 | 6 Pages |
Abstract
This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
A. Kärkkäinen, N. Tisnek, A. Manninen, N. Pesonen, A. Oja, H. Seppä,