| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 739045 | Sensors and Actuators A: Physical | 2007 | 7 Pages |
Abstract
A thin film actuator of a ferromagnetic shape memory alloy (FSMA) is presented allowing two degrees of freedom (2D) control of a bulk micromirror. The actuation mechanism is based on a simultaneous ferromagnetic and martensitic transformation. The movable parts of the actuator are designed as a monolithic device with two thermally and magnetically decoupled actuation units, which is demonstrated by coupled finite element simulations. The problem of FSMA thin film integration is solved by a novel transfer bonding process. First demonstrators of the FSMA actuator show a highly nonlinear response at low actuation voltage allowing large optical scanning angles up to 65° at tuneable frequencies.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
M. Kohl, D. Brugger, M. Ohtsuka, B. Krevet,