Article ID Journal Published Year Pages File Type
739154 Sensors and Actuators A: Physical 2006 4 Pages PDF
Abstract

A new microsystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employed CMOS technology has an active area of only 2.4 μm × 2.4 μm. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.

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Physical Sciences and Engineering Chemistry Electrochemistry
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