| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 739260 | Sensors and Actuators A: Physical | 2014 | 7 Pages |
•A new MEMS-based 3D confocal scanning microendoscope has been designed, constructed and experimentally verified.•The compact fiber-optic endoscopic probe integrates the MEMS scanners, fiber and high-quality micro-optics.•Both lateral scan and axial scan are performed by MEMS devices with large scan ranges and low drive voltages.•Polarization sensitive components have been employed to suppress unwanted reflections.•2D and 3D confocal reflectance images of various samples have been obtained with high resolutions.
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.
