Article ID Journal Published Year Pages File Type
739267 Sensors and Actuators A: Physical 2014 6 Pages PDF
Abstract

•The inductively coupled microplasma source easily ignites at atmospheric pressure.•A microplasma light source of vacuum ultraviolet light was demonstrated.•A chip for atmospheric-pressure microplasma was fabricated and characterized.•The chip generated a point-like microplasma of 200 μm diameter.•The point-like microplasma emitted clear spectral lines.

An inductively coupled microplasma source operating under atmospheric pressure was fabricated as a vacuum ultraviolet (VUV) light source. The microplasma source consisted of a quartz capillary tube (OD: Ø1.5 mm, ID: Ø1 mm) surrounded by a coil antenna. A floating wire electrode was set inside the tube to induce a high electrical potential. Under He gas flow (0.5 slm), 100 MHz VHF power was supplied to the coil antenna. The microplasma source easily achieved plasma ignition under ambient conditions. To extract the VUV emissions from the microplasma, an optical system was designed. VUV emissions of N, O, and H were obtained from the microplasma source operated at 10 W of VHF power at 100 MHz. The inductively coupled microplasma source operating at atmospheric pressure was further miniaturized using MEMS technology with the goal of developing an easily transportable device. The size of the fabricated microplasma chip was 20 mm × 3 mm. The chip generated a point-like microplasma of Ø200 μm at a VHF power of 24 W. The point-like microplasma emitted clear spectral lines.

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Physical Sciences and Engineering Chemistry Electrochemistry
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