| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 739442 | Sensors and Actuators A: Physical | 2014 | 7 Pages |
Abstract
Glow-discharge ion-sorption, magnetic-field-enhanced, MEMS silicon/glass high vacuum micropump has been shown. The 20 mm × 12 mm × 3.4 mm pump (dead volume circa 0.08 cm3) pumps 25 cm3 chamber down to 5 × 10−6 hPa (mbar) in several minutes, self-pumping limit is 3 × 10−7 hPa. Preliminary tests have shown no significant degradation of the device at least for 3 h of the continuous work.
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Authors
T. Grzebyk, A. Górecka-Drzazga, J.A. Dziuban,