| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 739669 | Sensors and Actuators A: Physical | 2013 | 9 Pages |
In this paper, a novel micro-vibration stage composed of four piezo actuators and a flexure hinge is proposed and developed. Each piezo actuator is developed by a new type of stroke magnifying mechanism incorporated with a multi-stacked PZT (lead zirconate titanate) and it is capable of performing micro vibrating motion. The flexure hinge, used to connect the piezo actuators, is designed to reduce the mutual interference of the linear motion of piezo actuators between two orthogonal directions and realize the in-plane parallel kinematic 2D vibration. According to the experimental results, the micro-vibration stage can generate large vibration amplitude up to 100 μm in two orthogonal directions independently at a frequency of 1100 Hz, and the vibration traces like line, circle and ellipse are acquired.
► A novel micro-vibration stage composed of four piezo actuators and a flexure hinge is proposed and developed. ► The micro-vibration stage can generate a large amplitude up to about 100 μm in two orthogonal directions independently at a frequency around 1100 Hz. ► The in-plane parallel kinematic 2D vibration is realized and the vibration traces like line, circle and ellipse are acquired.
