| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 739957 | Sensors and Actuators A: Physical | 2011 | 5 Pages |
Abstract
A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Etsuji Ogawa, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata,