Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
740239 | Sensors and Actuators A: Physical | 2010 | 8 Pages |
Abstract
A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
Keywords
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Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
A. Khiat, F. Lamarque, C. Prelle, Ph. Pouille, M. Leester-Schädel, S. Büttgenbach,