Low cost dislocation sensor with differential capacitor

A designed and constructed low cost dislocation sensor based on differential capacitor is described in this paper. Measurement methodology of several metrological properties of dislocation sensor was applied successfully and the results of these measurements are presented. Measurements were conducted in dislocation range of 3-6000 nm. Linearity of detector in the mentioned range was confirmed. Detector's sensitivity was estimated at the level of 1 nm. After digital compensation of temperature, reading stability was marked at the level of ±2 nm. The results of these measurements were included.