Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
740591 | Sensors and Actuators A: Physical | 2006 | 8 Pages |
Abstract
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50 μT with a sensitivity of 0.45 mV/μT.
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Authors
A. Baschirotto, F. Borghetti, E. Dallago, P. Malcovati, M. Marchesi, E. Melissano, P. Siciliano, G. Venchi,